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Abstract Synthesis of carbon nanotubes at low temperatures as low as 540oC was demonstrated via floating catalyst chemical vapor deposition method. Catalytic decomposition of benzene was employed using ferrocene as a catalyst precursor. In this function, the issue of introducing catalyst particles into the reactor was developed by using single heating source for both the catalyst and reactor. In-situ monitoring apparatus was utilized to detect the temperature profile in the reactor and so, to initiate the response. CNTs with both kinds (aligned and entangled) have been synthesized with diameter supply ranging from 10 to 40 nm. This new technique would contribute with the synthesis of carbon nanotubes for microelectronic applications since it offers comparatively low density temperature. Intro: Since their first discovery in 1991 (Iijima, 1991), carbon nanotubes attracted much attention due to nanoscale dimensions and promising shape in addition to their potential properties. Many methods for the synthesis of CNTs are utilized and developed (Ajayan, 1992; Ishigami et al., 2000; Lee et al., 2002). Among all synthesis methods, chemical vapor deposition (CVD) is widely used to thanks to the efficient cost and very low operating temperatures needed (Shyu et al.,2001; Han et al., 2003; Ni et al., 2006). Based on the method of introducing the metallic catalyst into the reactor, the CVD method can be run via supporting catalyst or floating catalyst technique. Floating catalyst method (FC-CVD) has gained much popularity because of its simplicity and the purification step is not required to recover CNTs in the substrate. Additionally, direct merchandise selection from the effluent and the lack of support material further reduce the amount.