ASSIGNMENT ID
1004420
SUBJECT AREA Arts entertainment
DOCUMENT TYPE Essay
CREATED ON 7th January 2018

Composing on Multi Ion Beam Sputtering Technique

A multi ion beam sputtering technique can be used to successfully fabricate ferroelectric lead zirconate titanate (PZT). This technique is quite advantageous because the ion beam current and voltage can be attuned allowing for the control of regular density and energy of sputtered substances. This technique also has lower working pressures during deposition, controllable deposition, and exceptional uniformity over larger regions, reproducibility, and localized plasma within an ion source. Ion beam sputtering is a wonderful expansion technique and been used widely to deposit oxide pictures and semiconductors. However, this method was used largely to deposit only element oxides and not multi element compounds such as ferroelectrics such as PZT. This is most likely because of the absence of uniformity, reproducibility and control of stoichiometry with high number of elemental compounds. An experiment has been conducted at the Materials Research Laboratory, in Pennsylvania State University, University Park using a multipurpose ion beam method to deposit PZT on various unheated substrates. In the experiment a multi ion beam sputtering method was used to sputter PZT from metals of Pb, Zr, and Ti. This system offers uniformity over large regions, and management over stoichiometry because PZT was divided up into only elemental compounds. In the experiment the three metals targets, Pb, Zr, and Ti were placed on adjustable brackets. The brackets were created to be flexible and adjustable so that they can be placed in any situation concerning the ion beam. Three main ion sources were concentrated and adjusted with respect to the goals. The goals have been set a distance of approximately 11 to 16 cm in the ion source and a shutter was pla...

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